Nano Imprint Lithography

Inkron has an advanced EVG7200 NIL system to nanoimprint diffractive optics. This instrument is equipped with an optical positioning system, a heated chuck and other equipment necessary to optimize the NIL process for customer designs with the selected resins. The tool can handle wafers up to 200 mm in diameter. The EVG7200 is located in a cleanroom to guarantee optimum product quality. A fully equipped laboratory supports the projects. Capacity allows pilot- and small-scale production runs.

Inkron’s nano-imprintable resins are commercially available and ready for testing with specific customer designs. These resins are the key components in diffractive optical elements (DOE). Typical applications include augmented reality waveguides, 3D sensors, LIDAR and displays.